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Photoelastic characterization of residual strain in GaAs wafers annealed in holders of different geometry
Photoelastic characterization of residual strain in GaAs wafers annealed in holders of different geometry
Photoelastic characterization of residual strain in GaAs wafers annealed in holders of different geometry
Herms, M. (author) / Fukuzawa, M. (author) / Yamada, M. (author) / Klober, J. (author) / Zychowitz, G. (author) / Niklas, J.R. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 66 ; 7 - 10
1999-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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