Relaxed SiGe buffer layer growth with point defect injection: Fid-Bau Portal

Relaxed SiGe buffer layer growth with point defect injection

Lyutovich, K. / Kasper, E. / Ernst, F. / Bauer, M. / Oehme, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Relaxed SiGe buffer layer growth with point defect injection

Lyutovich, K. / Kasper, E. / Ernst, F. / Bauer, M. / Oehme, M.

Relaxed SiGe buffer layer growth with point defect injection

Lyutovich, K. / Kasper, E. / Ernst, F. / Bauer, M. / Oehme, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Relaxed SiGe buffer layer growth with point defect injection

Contributors:

Lyutovich, K. (author) / Kasper, E. (author) / Ernst, F. (author) / Bauer, M. (author) / Oehme, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 71 ; 14 - 19

Publication date:

2000-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Bollani, M. / Muller, E. / Signoretti, S. et al. | British Library Online Contents | 2003

Resonant tunneling in Si-SiGe superlattices on relaxed buffer substrates

Tsujino, S. / Mentese, S. / Diehl, L. et al. | British Library Online Contents | 2004

Matrix effects in SIMS depth profiles of SiGe relaxed buffer layers

Sanchez-Almazan, F. / Napolitani, E. / Carnera, A. et al. | British Library Online Contents | 2004

Defect imaging of SiGe strain relaxed buffers grown by LEPECVD

Marchionna, S. / Virtuani, A. / Acciarri, M. et al. | British Library Online Contents | 2006

Surface smoothing of SiGe strain-relaxed buffer layers by chemical mechanical polishing

Sawano, K. / Kawaguchi, K. / Ueno, T. et al. | British Library Online Contents | 2002