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Surface smoothing of SiGe strain-relaxed buffer layers by chemical mechanical polishing

Sawano, K. / Kawaguchi, K. / Ueno, T. / Koh, S. / Nakagawa, K. / Shiraki, Y.

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Surface smoothing of SiGe strain-relaxed buffer layers by chemical mechanical polishing

Sawano, K. / Kawaguchi, K. / Ueno, T. / Koh, S. / Nakagawa, K. / Shiraki, Y.

Surface smoothing of SiGe strain-relaxed buffer layers by chemical mechanical polishing

Sawano, K. / Kawaguchi, K. / Ueno, T. / Koh, S. / Nakagawa, K. / Shiraki, Y.

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Check availability in my library

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Document information

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Document information

Title:

Surface smoothing of SiGe strain-relaxed buffer layers by chemical mechanical polishing

Contributors:

Sawano, K. (author) / Kawaguchi, K. (author) / Ueno, T. (author) / Koh, S. (author) / Nakagawa, K. (author) / Shiraki, Y. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 406 - 409

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Bollani, M. / Muller, E. / Signoretti, S. et al. | British Library Online Contents | 2003

Matrix effects in SIMS depth profiles of SiGe relaxed buffer layers

Sanchez-Almazan, F. / Napolitani, E. / Carnera, A. et al. | British Library Online Contents | 2004

Observation of strain field fluctuation in SiGe-relaxed buffer layers and its influence on overgrown structures

Sawano, K. / Usami, N. / Arimoto, K. et al. | British Library Online Contents | 2005

Ge self-assembled islands grown on SiGe/Si(001) relaxed buffer layers

Shaleev, M. V. / Novikov, A. V. / Kuznetsov, O. A. et al. | British Library Online Contents | 2005

Formation of relaxed SiGe on the buffer consists of modified SiGe stacked layers by Si pre-intermixing

Chen, P. S. / Lee, S. W. / Lee, M. H. et al. | British Library Online Contents | 2008