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    Infrared characterization of oxygen precipitates in silicon wafers with different concentrations of interstitial oxygen

    New search for: Borghesi, A.
    New search for: Sassella, A.
    New search for: Geranzani, P.
    New search for: Porrini, M.
    New search for: Pivac, B.

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    Infrared characterization of oxygen precipitates in silicon wafers with different concentrations of interstitial oxygen

    New search for: Borghesi, A.
    New search for: Sassella, A.
    New search for: Geranzani, P.
    New search for: Porrini, M.
    New search for: Pivac, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Infrared characterization of oxygen precipitates in silicon wafers with different concentrations of interstitial oxygen

    New search for: Borghesi, A.
    New search for: Sassella, A.
    New search for: Geranzani, P.
    New search for: Porrini, M.
    New search for: Pivac, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Infrared characterization of oxygen precipitates in silicon wafers with different concentrations of interstitial oxygen

    Contributors:

    Borghesi, A. (author) / Sassella, A. (author) / Geranzani, P. (author) / Porrini, M. (author) / Pivac, B. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 145 - 148

    Publication date:

    2000-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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