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Absorption coefficient of oxide precipitates in silicon wafers after different three-step annealing
Absorption coefficient of oxide precipitates in silicon wafers after different three-step annealing
Absorption coefficient of oxide precipitates in silicon wafers after different three-step annealing
Sassella, A. (author) / Borghesi, A. (author) / Geranzani, P. (author) / Olmo, M. (author) / Porrini, M. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 102 ; 247-250
2003-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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