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    Absorption coefficient of oxide precipitates in silicon wafers after different three-step annealing

    New search for: Sassella, A.
    New search for: Borghesi, A.
    New search for: Geranzani, P.
    New search for: Olmo, M.
    New search for: Porrini, M.

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    Absorption coefficient of oxide precipitates in silicon wafers after different three-step annealing

    New search for: Sassella, A.
    New search for: Borghesi, A.
    New search for: Geranzani, P.
    New search for: Olmo, M.
    New search for: Porrini, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Absorption coefficient of oxide precipitates in silicon wafers after different three-step annealing

    New search for: Sassella, A.
    New search for: Borghesi, A.
    New search for: Geranzani, P.
    New search for: Olmo, M.
    New search for: Porrini, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Absorption coefficient of oxide precipitates in silicon wafers after different three-step annealing

    Contributors:

    Sassella, A. (author) / Borghesi, A. (author) / Geranzani, P. (author) / Olmo, M. (author) / Porrini, M. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 102 ; 247-250

    Publication date:

    2003-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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