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Cluster ripening and transient enhanced diffusion in silicon

Cowern, N. E. / Mannino, G. / Stolk, P. A. / Roozeboom, F. / Huizing, H. G. / van Berkum, J. G. / Cristiano, F. / Claverie, A. / Jaraiz, M.

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Cluster ripening and transient enhanced diffusion in silicon

Cowern, N. E. / Mannino, G. / Stolk, P. A. / Roozeboom, F. / Huizing, H. G. / van Berkum, J. G. / Cristiano, F. / Claverie, A. / Jaraiz, M.

Cluster ripening and transient enhanced diffusion in silicon

Cowern, N. E. / Mannino, G. / Stolk, P. A. / Roozeboom, F. / Huizing, H. G. / van Berkum, J. G. / Cristiano, F. / Claverie, A. / Jaraiz, M.

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Title:

Cluster ripening and transient enhanced diffusion in silicon

Contributors:

Cowern, N. E. (author) / Mannino, G. (author) / Stolk, P. A. (author) / Roozeboom, F. (author) / Huizing, H. G. (author) / van Berkum, J. G. (author) / Cristiano, F. (author) / Claverie, A. (author) / Jaraiz, M. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 2 ; 369-376

Publication date:

1999-01-01

Size:

8 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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