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Damage Evolution in Al-implanted 4H SiC

Hallen, A. / Persson, P. O. A. / Kuznetsov, A. Y. / Hultman, L. / Svensson, B. G.

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Damage Evolution in Al-implanted 4H SiC

Hallen, A. / Persson, P. O. A. / Kuznetsov, A. Y. / Hultman, L. / Svensson, B. G.

Damage Evolution in Al-implanted 4H SiC

Hallen, A. / Persson, P. O. A. / Kuznetsov, A. Y. / Hultman, L. / Svensson, B. G.

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Check availability in my library

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Document information

Title:

Damage Evolution in Al-implanted 4H SiC

Contributors:

Hallen, A. (author) / Persson, P. O. A. (author) / Kuznetsov, A. Y. (author) / Hultman, L. (author) / Svensson, B. G. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 869-872

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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