The viscosity of germanium during substrate relaxation upon thermal anneal

Rosenberg, S. E. / Madras, C. G. / Wong, P. Y. et al. | British Library Online Contents | 1997

4H-SiC DMOSFETs Processed Using Graphite Capped Implant Activation Anneal

Fedison, J. B. / Cowen, C. S. / Garrett, J. L. et al. | British Library Online Contents | 2006

Thermal anneal activation of defects in hydrogen plasma-treated silicon

Nam, C. W. / Tanabe, A. / Ashok, S. | British Library Online Contents | 1996

Damage annealing and dopant activation in Al ion implanted -SiC

Canut, B. / Ramos, S. / Roger, J.-A. et al. | British Library Online Contents | 1997

Development of the Novel Electron Bombardment Anneal System (EBAS) for SiC Post Ion Implantation Anneal

Shibagaki, M. / Kurematsu, Y. / Watanabe, F. et al. | British Library Online Contents | 2005