Searching for Device Processing Compatible Ohmic Contacts to Implanted p-Type 4H-SiC: Fid-Bau Portal

Searching for Device Processing Compatible Ohmic Contacts to Implanted p-Type 4H-SiC

Luo, Y. / Yan, F. / Tone, K. / Zhao, J. H. / Crofton, J.

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Searching for Device Processing Compatible Ohmic Contacts to Implanted p-Type 4H-SiC

Luo, Y. / Yan, F. / Tone, K. / Zhao, J. H. / Crofton, J.

Searching for Device Processing Compatible Ohmic Contacts to Implanted p-Type 4H-SiC

Luo, Y. / Yan, F. / Tone, K. / Zhao, J. H. / Crofton, J.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Searching for Device Processing Compatible Ohmic Contacts to Implanted p-Type 4H-SiC

Contributors:

Luo, Y. (author) / Yan, F. (author) / Tone, K. (author) / Zhao, J. H. (author) / Crofton, J. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 1013-1016

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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