Effects of Steam Annealing on Electrical Characteristics of 3C-SiC Metal-Oxide-Semiconductor Structures: Fid-Bau Portal

Effects of Steam Annealing on Electrical Characteristics of 3C-SiC Metal-Oxide-Semiconductor Structures

Yoshikawa, M. / Kojima, K. / Ohshima, T. / Itoh, H. / Okada, S. / Ishida, Y.

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Effects of Steam Annealing on Electrical Characteristics of 3C-SiC Metal-Oxide-Semiconductor Structures

Yoshikawa, M. / Kojima, K. / Ohshima, T. / Itoh, H. / Okada, S. / Ishida, Y.

Effects of Steam Annealing on Electrical Characteristics of 3C-SiC Metal-Oxide-Semiconductor Structures

Yoshikawa, M. / Kojima, K. / Ohshima, T. / Itoh, H. / Okada, S. / Ishida, Y.

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Document information

Title:

Effects of Steam Annealing on Electrical Characteristics of 3C-SiC Metal-Oxide-Semiconductor Structures

Contributors:

Yoshikawa, M. (author) / Kojima, K. (author) / Ohshima, T. (author) / Itoh, H. (author) / Okada, S. (author) / Ishida, Y. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 1129-1132

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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