Correlation of EBIC and SWBXT Imaged Defects and Epilayer Growth Pits in 6H-SiC Schottky Diodes: Fid-Bau Portal

Correlation of EBIC and SWBXT Imaged Defects and Epilayer Growth Pits in 6H-SiC Schottky Diodes

Schnabel, C. M. / Tabib-Azar, M. / Neudeck, P. G. / Bailey, S. G. / Su, H. B. / Dudley, M. / Raffaelle, R. P.

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Correlation of EBIC and SWBXT Imaged Defects and Epilayer Growth Pits in 6H-SiC Schottky Diodes

Schnabel, C. M. / Tabib-Azar, M. / Neudeck, P. G. / Bailey, S. G. / Su, H. B. / Dudley, M. / Raffaelle, R. P.

Correlation of EBIC and SWBXT Imaged Defects and Epilayer Growth Pits in 6H-SiC Schottky Diodes

Schnabel, C. M. / Tabib-Azar, M. / Neudeck, P. G. / Bailey, S. G. / Su, H. B. / Dudley, M. / Raffaelle, R. P.

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Title:

Correlation of EBIC and SWBXT Imaged Defects and Epilayer Growth Pits in 6H-SiC Schottky Diodes

Contributors:

Schnabel, C. M. (author) / Tabib-Azar, M. (author) / Neudeck, P. G. (author) / Bailey, S. G. (author) / Su, H. B. (author) / Dudley, M. (author) / Raffaelle, R. P. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 489-492

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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