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Virtual substrates for the n- and p-type Si-MODFET grown at very high rates

Rosenblad, C. / Kummer, M. / Dommann, A. / Muller, E. / Gusso, M. / Tapfer, L. / von Kanel, H.

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Virtual substrates for the n- and p-type Si-MODFET grown at very high rates

Rosenblad, C. / Kummer, M. / Dommann, A. / Muller, E. / Gusso, M. / Tapfer, L. / von Kanel, H.

Virtual substrates for the n- and p-type Si-MODFET grown at very high rates

Rosenblad, C. / Kummer, M. / Dommann, A. / Muller, E. / Gusso, M. / Tapfer, L. / von Kanel, H.

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Document information

Title:

Virtual substrates for the n- and p-type Si-MODFET grown at very high rates

Contributors:

Rosenblad, C. (author) / Kummer, M. (author) / Dommann, A. (author) / Muller, E. (author) / Gusso, M. (author) / Tapfer, L. (author) / von Kanel, H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 74 ; 113 - 117

Publication date:

2000-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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