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Copper Metallization for High Performance Silicon Technology

Rosenberg, R. / Edelstein, D. C. / Hu, C.-K. / Rodbell, K. P.

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Copper Metallization for High Performance Silicon Technology

Rosenberg, R. / Edelstein, D. C. / Hu, C.-K. / Rodbell, K. P.

Copper Metallization for High Performance Silicon Technology

Rosenberg, R. / Edelstein, D. C. / Hu, C.-K. / Rodbell, K. P.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Copper Metallization for High Performance Silicon Technology

Contributors:

Rosenberg, R. (author) / Edelstein, D. C. (author) / Hu, C.-K. (author) / Rodbell, K. P. (author)

Published in:

ANNUAL REVIEW OF MATERIALS SCIENCE ; 30 ; 229-262

Publication date:

2000-01-01

Size:

34 pages

ISSN:

0084-6600

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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