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Copper Metallization for High Performance Silicon Technology
Copper Metallization for High Performance Silicon Technology
Copper Metallization for High Performance Silicon Technology
Rosenberg, R. (author) / Edelstein, D. C. (author) / Hu, C.-K. (author) / Rodbell, K. P. (author)
ANNUAL REVIEW OF MATERIALS SCIENCE ; 30 ; 229-262
2000-01-01
34 pages
Article (Journal)
English
DDC:
620.11
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