Combinatorial Generation and Analysis of Nanometer- and Micrometer-Scale Silicon Features via "Dip-Pen" Nanolithography and Wet Chemical Etching: Fid-Bau Portal

Combinatorial Generation and Analysis of Nanometer- and Micrometer-Scale Silicon Features via "Dip-Pen" Nanolithography and Wet Chemical Etching

Weinberger, D. A. / Hong, S. / Mirkin, C. A. / Wessels, B. W. / Higgins, T. B.

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Combinatorial Generation and Analysis of Nanometer- and Micrometer-Scale Silicon Features via "Dip-Pen" Nanolithography and Wet Chemical Etching

Weinberger, D. A. / Hong, S. / Mirkin, C. A. / Wessels, B. W. / Higgins, T. B.

Combinatorial Generation and Analysis of Nanometer- and Micrometer-Scale Silicon Features via "Dip-Pen" Nanolithography and Wet Chemical Etching

Weinberger, D. A. / Hong, S. / Mirkin, C. A. / Wessels, B. W. / Higgins, T. B.

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Check availability in my library

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Document information

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Document information

Title:

Combinatorial Generation and Analysis of Nanometer- and Micrometer-Scale Silicon Features via "Dip-Pen" Nanolithography and Wet Chemical Etching

Contributors:

Weinberger, D. A. (author) / Hong, S. (author) / Mirkin, C. A. (author) / Wessels, B. W. (author) / Higgins, T. B. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 12 ; 1600-1603

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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