Technical Note: Excimer laser–induced etching of semiconductors and metals

Peyre, J .–L. / Riviere, D. / Vannier, C. et al. | British Library Online Contents | 1990

Excimer Laser Etching

Boatner, L. / Longmire, H. / Rouleau, C. et al. | British Library Online Contents | 2008

Excimer laser induced chlorine etching of Si patterns for microelectronics

Baumgaertner, H. / Jiang, W. / Eisele, I. | British Library Online Contents | 1996

Laser-induced front side etching of CaF2 crystals with KrF excimer laser

Lorenz, P. / Ehrhardt, M. / Zimmer, K. | British Library Online Contents | 2013

Excimer-laser patterning of copper in LDE (laser dry etching)

Pfleging, W. / Voerckel, A. / Duddek, H. et al. | British Library Online Contents | 1997