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    The interface of fluorinated amorphous carbon with copper metallization

    New search for: Ariel, N.
    New search for: Eizenberg, M.
    New search for: Wang, Y.
    New search for: Bakhru, H.

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    The interface of fluorinated amorphous carbon with copper metallization

    New search for: Ariel, N.
    New search for: Eizenberg, M.
    New search for: Wang, Y.
    New search for: Bakhru, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The interface of fluorinated amorphous carbon with copper metallization

    New search for: Ariel, N.
    New search for: Eizenberg, M.
    New search for: Wang, Y.
    New search for: Bakhru, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    The interface of fluorinated amorphous carbon with copper metallization

    Contributors:

    Ariel, N. (author) / Eizenberg, M. (author) / Wang, Y. (author) / Bakhru, H. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 302 ; 26 - 30

    Publication date:

    2001-01-01

    Size:

    5 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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