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Planar oxidation of strained silicon substrates

Lin, M.-T. / Jaccodine, R. J. / Delph, T. J.

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Planar oxidation of strained silicon substrates

Lin, M.-T. / Jaccodine, R. J. / Delph, T. J.

Planar oxidation of strained silicon substrates

Lin, M.-T. / Jaccodine, R. J. / Delph, T. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Planar oxidation of strained silicon substrates

Contributors:

Lin, M.-T. (author) / Jaccodine, R. J. (author) / Delph, T. J. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 16 ; 728-733

Publication date:

2001-01-01

Size:

6 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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