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Strained silicon on insulator (SSOI) by waferbonding

Christiansen, S. H. / Singh, R. / Radu, I. / Reiche, M. / Gosele, U. / Webb, D. / Bukalo, S. / Dietrich, B.

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Strained silicon on insulator (SSOI) by waferbonding

Christiansen, S. H. / Singh, R. / Radu, I. / Reiche, M. / Gosele, U. / Webb, D. / Bukalo, S. / Dietrich, B.

Strained silicon on insulator (SSOI) by waferbonding

Christiansen, S. H. / Singh, R. / Radu, I. / Reiche, M. / Gosele, U. / Webb, D. / Bukalo, S. / Dietrich, B.

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Order at Subito €

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Document information

Title:

Strained silicon on insulator (SSOI) by waferbonding

Contributors:

Christiansen, S. H. (author) / Singh, R. (author) / Radu, I. (author) / Reiche, M. (author) / Gosele, U. (author) / Webb, D. (author) / Bukalo, S. (author) / Dietrich, B. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 8 ; 197-202

Publication date:

2005-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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sSOI fabrication by wafer bonding and layer splitting of thin SiGe virtual substrates

Radu, I. / Himcinschi, C. / Singh, R. et al. | British Library Online Contents | 2006

Fabrication and device characteristics of strained-Si-on-insulator (strained-SOI) CMOS

Takagi, S. i. / Mizuno, T. / Tezuka, T. et al. | British Library Online Contents | 2004

The electronic structure peculiarities of a strained silicon layer in silicon-on-insulator: Experimental and theoretical data

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