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The evolution of hydrogen molecule formation in hydrogen-plasma-treated Czochralski silicon
The evolution of hydrogen molecule formation in hydrogen-plasma-treated Czochralski silicon
The evolution of hydrogen molecule formation in hydrogen-plasma-treated Czochralski silicon
Job, R. (author) / Ulyashin, A. G. (author) / Fahrner, W. R. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 257-260
2001-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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