Laser thermal processing using an optical coating for ultra shallow junction formation

Hernandez, M. / Venturini, J. / Berard, D. et al. | British Library Online Contents | 2004

Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments

Hernandez, M. / Venturini, J. / Zahorski, D. et al. | British Library Online Contents | 2003

Modeling of boron diffusion in polysilicon-on-silicon structures using a rapid thermal anneal step for ultra-shallow junction formation

Sultan, A. / Batra, S. / Lux, G. E. et al. | British Library Online Contents | 1995

Ultra-shallow junction formation by spike annealing in a lamp-based or hot-walled rapid thermal annealing system: effect of ramp-up rate

Agarwal, A. / Fiory, A. T. / Gossmann, H.-J. L. et al. | British Library Online Contents | 1998

Effect of number of laser pulses on p+/n silicon ultra-shallow junction formation during non-melt ultra-violet laser thermal annealing

Jung, Sang Min / Park, Chul Jin / Jeong, Hongsik et al. | British Library Online Contents | 2017