Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies

Eyben, P. / Janssens, T. / Vandervorst, W. | British Library Online Contents | 2005

Carrier Concentrations in Implanted and Epitaxial 4H-SiC by Scanning Spreading Resistance Microscopy

Osterman, J. / Anand, S. / Linnarsson, M. K. et al. | British Library Online Contents | 2002

Towards sub-10nm carrier profiling with spreading resistance techniques

Clarysse, T. / Eyben, P. / Hantschel, T. et al. | British Library Online Contents | 2001

Quantitative Two-Dimensional Carrier Mapping in Silicon Nanowire-Based Tunnel-Field Effect Transistors Using Scanning Spreading Resistance Microscopy

Schulze, A. / Hantschel, T. / Eyben, P. et al. | British Library Conference Proceedings | 2010

Scanning spreading resistance microscopy of aluminum implanted 4H-SiC

Osterman, J. / Abtin, L. / Zimmermann, U. et al. | British Library Online Contents | 2003