Isotropic Etching of SiC: Fid-Bau Portal

Isotropic Etching of SiC

Stauden, T. / Niebelschutz, F. / Tonisch, K. / Cimalla, V. / Ecke, G. / Haupt, C. / Pezoldt, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Isotropic Etching of SiC

Stauden, T. / Niebelschutz, F. / Tonisch, K. / Cimalla, V. / Ecke, G. / Haupt, C. / Pezoldt, J.

Isotropic Etching of SiC

Stauden, T. / Niebelschutz, F. / Tonisch, K. / Cimalla, V. / Ecke, G. / Haupt, C. / Pezoldt, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Isotropic Etching of SiC

Contributors:

Stauden, T. (author) / Niebelschutz, F. (author) / Tonisch, K. (author) / Cimalla, V. (author) / Ecke, G. (author) / Haupt, C. (author) / Pezoldt, J. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 651-654

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Niebelschutz, F. / Stauden, T. / Tonisch, K. et al. | British Library Online Contents | 2010

Non-monotonic roughening at early stages of isotropic silicon etching

Dhillon, P. K. / Sarkar, S. | British Library Online Contents | 2013

Fabrication of Nanometer-Scale Features by Controlled Isotropic Wet Chemical Etching

Love, J. C. / Paul, K. E. / Whitesides, G. M. | British Library Online Contents | 2001

Isotropic wet chemical etching of deep channels with optical surface quality in silicon with HNA based etching solutions

Bauhuber, M. / Mikrievskij, A. / Lechner, A. | British Library Online Contents | 2013

How isotropic are quasi-isotropic laminates

Van Otterloo, D. L. / Dayal, V. | British Library Online Contents | 2003