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    The impact of substrate properties and thermal annealing on tantalum nitride thin films

    New search for: Grosser, M.
    New search for: Munch, M.
    New search for: Seidel, H.
    New search for: Bienert, C.
    New search for: Roosen, A.
    New search for: Schmid, U.

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    The impact of substrate properties and thermal annealing on tantalum nitride thin films

    New search for: Grosser, M.
    New search for: Munch, M.
    New search for: Seidel, H.
    New search for: Bienert, C.
    New search for: Roosen, A.
    New search for: Schmid, U.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The impact of substrate properties and thermal annealing on tantalum nitride thin films

    New search for: Grosser, M.
    New search for: Munch, M.
    New search for: Seidel, H.
    New search for: Bienert, C.
    New search for: Roosen, A.
    New search for: Schmid, U.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    The impact of substrate properties and thermal annealing on tantalum nitride thin films

    Contributors:

    Grosser, M. (author) / Munch, M. (author) / Seidel, H. (author) / Bienert, C. (author) / Roosen, A. (author) / Schmid, U. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 258 ; 2894-2900

    Publication date:

    2012-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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