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The impact of substrate properties and thermal annealing on tantalum nitride thin films
The impact of substrate properties and thermal annealing on tantalum nitride thin films
The impact of substrate properties and thermal annealing on tantalum nitride thin films
Grosser, M. (author) / Munch, M. (author) / Seidel, H. (author) / Bienert, C. (author) / Roosen, A. (author) / Schmid, U. (author)
APPLIED SURFACE SCIENCE ; 258 ; 2894-2900
2012-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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