Deep reactive ion etching: a promising technology for micro- and nanosatellites: Fid-Bau Portal

Deep reactive ion etching: a promising technology for micro- and nanosatellites

Ayon, A. A. / Bayt, R. L. / Breuer, K. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Deep reactive ion etching: a promising technology for micro- and nanosatellites

Ayon, A. A. / Bayt, R. L. / Breuer, K. S.

Deep reactive ion etching: a promising technology for micro- and nanosatellites

Ayon, A. A. / Bayt, R. L. / Breuer, K. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Deep reactive ion etching: a promising technology for micro- and nanosatellites

Contributors:

Ayon, A. A. (author) / Bayt, R. L. (author) / Breuer, K. S. (author)

Published in:

Special Issue on Space Applications for MEMS ; 1135-1144

SMART MATERIALS AND STRUCTURES ; 10

Publication date:

2001-01-01

Size:

10 pages

ISSN:

0964-1726

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530

Similar titles

Deep reactive ion etching of PMMA

Zhang, C. / Yang, C. / Ding, D. | British Library Online Contents | 2004

ESA Nanosatellites for D3S (Distributed Space Weather Sensor System)

Rowe, Samantha / Eckersley, Steve / Nikki, Antoniou et al. | BASE | 2022

Free access

Study of deep silicon etching for micro-gyroscope fabrication

Fu, L. / Miao, J. M. / Li, X. X. et al. | British Library Online Contents | 2001

Deep reactive ion etching of auxetic structures: present capabilities and challenges

Muslija, A. / Lantada, A.D. | British Library Online Contents | 2014

Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching

Zhang, H. / Amro, N. A. / Disawal, S. et al. | British Library Online Contents | 2006