Surface smoothing of SiGe strain-relaxed buffer layers by chemical mechanical polishing

Sawano, K. / Kawaguchi, K. / Ueno, T. et al. | British Library Online Contents | 2002

Compressively strained Ge channels on relaxed SiGe buffer layers

Bollani, M. / Muller, E. / Signoretti, S. et al. | British Library Online Contents | 2003

Matrix effects in SIMS depth profiles of SiGe relaxed buffer layers

Sanchez-Almazan, F. / Napolitani, E. / Carnera, A. et al. | British Library Online Contents | 2004

Ge self-assembled islands grown on SiGe/Si(001) relaxed buffer layers

Shaleev, M. V. / Novikov, A. V. / Kuznetsov, O. A. et al. | British Library Online Contents | 2005

Formation of relaxed SiGe on the buffer consists of modified SiGe stacked layers by Si pre-intermixing

Chen, P. S. / Lee, S. W. / Lee, M. H. et al. | British Library Online Contents | 2008