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Electrical characterization of interfaces in unitype directly bonded silicon wafers

Fedotov, A. / Saad, A. M. / Enisherlova, K. / Mazanik, A.

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Electrical characterization of interfaces in unitype directly bonded silicon wafers

Fedotov, A. / Saad, A. M. / Enisherlova, K. / Mazanik, A.

Electrical characterization of interfaces in unitype directly bonded silicon wafers

Fedotov, A. / Saad, A. M. / Enisherlova, K. / Mazanik, A.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Electrical characterization of interfaces in unitype directly bonded silicon wafers

Contributors:

Fedotov, A. (author) / Saad, A. M. (author) / Enisherlova, K. (author) / Mazanik, A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 91-92 ; 384 - 388

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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