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    Structural characterization of ultra-thin (001) silicon films bonded onto (001) silicon wafers

    New search for: Rousseau, K.
    New search for: Rouviere, J. L.
    New search for: Fournel, F.
    New search for: Moriceau, H.

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    Structural characterization of ultra-thin (001) silicon films bonded onto (001) silicon wafers

    New search for: Rousseau, K.
    New search for: Rouviere, J. L.
    New search for: Fournel, F.
    New search for: Moriceau, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structural characterization of ultra-thin (001) silicon films bonded onto (001) silicon wafers

    New search for: Rousseau, K.
    New search for: Rouviere, J. L.
    New search for: Fournel, F.
    New search for: Moriceau, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Structural characterization of ultra-thin (001) silicon films bonded onto (001) silicon wafers

    Contributors:

    Rousseau, K. (author) / Rouviere, J. L. (author) / Fournel, F. (author) / Moriceau, H. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 101-104

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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