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    Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping

    New search for: Kerrien, G.
    New search for: Boulmer, J.
    New search for: Debarre, D.
    New search for: Bouchier, D.
    New search for: Grouillet, A.
    New search for: Lenoble, D.

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    Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping

    New search for: Kerrien, G.
    New search for: Boulmer, J.
    New search for: Debarre, D.
    New search for: Bouchier, D.
    New search for: Grouillet, A.
    New search for: Lenoble, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping

    New search for: Kerrien, G.
    New search for: Boulmer, J.
    New search for: Debarre, D.
    New search for: Bouchier, D.
    New search for: Grouillet, A.
    New search for: Lenoble, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping

    Contributors:

    Kerrien, G. (author) / Boulmer, J. (author) / Debarre, D. (author) / Bouchier, D. (author) / Grouillet, A. (author) / Lenoble, D. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 186 ; 45-51

    Publication date:

    2002-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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