Optical characterization of laser processed ultra-shallow junctions: Fid-Bau Portal

Optical characterization of laser processed ultra-shallow junctions

Kerrien, G. / Hernandez, M. / Laviron, C. / Sarnet, T. / Debarre, D. / Noguchi, T. / Zahorski, D. / Venturini, J. / Semeria, M. N. / Boulmer, J.

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Optical characterization of laser processed ultra-shallow junctions

Kerrien, G. / Hernandez, M. / Laviron, C. / Sarnet, T. / Debarre, D. / Noguchi, T. / Zahorski, D. / Venturini, J. / Semeria, M. N. / Boulmer, J.

Optical characterization of laser processed ultra-shallow junctions

Kerrien, G. / Hernandez, M. / Laviron, C. / Sarnet, T. / Debarre, D. / Noguchi, T. / Zahorski, D. / Venturini, J. / Semeria, M. N. / Boulmer, J.

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Document information

Title:

Optical characterization of laser processed ultra-shallow junctions

Contributors:

Kerrien, G. (author) / Hernandez, M. (author) / Laviron, C. (author) / Sarnet, T. (author) / Debarre, D. (author) / Noguchi, T. (author) / Zahorski, D. (author) / Venturini, J. (author) / Semeria, M. N. (author) / Boulmer, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 208/209 ; 277-284

Publication date:

2003-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Borden, P. | British Library Online Contents | 2001

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Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping

Kerrien, G. / Boulmer, J. / Debarre, D. et al. | British Library Online Contents | 2002

Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII)

Vervisch, V. / Larmande, Y. / Delaporte, P. et al. | British Library Online Contents | 2009

Non-melt laser annealing of Plasma Implanted Boron for ultra shallow junctions in Silicon

Florakis, A. / Misra, N. / Grigoropoulos, C. et al. | British Library Online Contents | 2008