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Applications and processing of SiGe and SiGe:C for high-speed HBT devices

Meyer, D. J. / Webb, D. A. / Ward, M. G. / Sellar, J. D. / Zeng, P. Y. / Robinson, J.

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Applications and processing of SiGe and SiGe:C for high-speed HBT devices

Meyer, D. J. / Webb, D. A. / Ward, M. G. / Sellar, J. D. / Zeng, P. Y. / Robinson, J.

Applications and processing of SiGe and SiGe:C for high-speed HBT devices

Meyer, D. J. / Webb, D. A. / Ward, M. G. / Sellar, J. D. / Zeng, P. Y. / Robinson, J.

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Document information

Title:

Applications and processing of SiGe and SiGe:C for high-speed HBT devices

Contributors:

Meyer, D. J. (author) / Webb, D. A. (author) / Ward, M. G. (author) / Sellar, J. D. (author) / Zeng, P. Y. (author) / Robinson, J. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 529-533

Publication date:

2001-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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