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Distribution Profile of Deep Levels in SiC Observed by Isothermal Capacitance Transient Spectroscopy
Distribution Profile of Deep Levels in SiC Observed by Isothermal Capacitance Transient Spectroscopy
Distribution Profile of Deep Levels in SiC Observed by Isothermal Capacitance Transient Spectroscopy
Fujimaki, M. (author) / Ono, R. (author) / Kushibe, M. (author) / Masahara, K. (author) / Kojima, K. (author) / Shinohe, T. (author) / Okushi, H. (author) / Arai, K. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 851-854
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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Observation of Deep Levels in SiC by Optical-Isothermal Capacitance Transient Spectroscopy
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