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    Optical-Capacitance-Transient Spectroscopy Study for Deep Levels in 4H-SiC Epilayer Grown by Cold Wall Chemical Vapor Deposition

    New search for: Kato, M.
    New search for: Tanaka, S.
    New search for: Ichimura, M.
    New search for: Arai, E.
    New search for: Nakamura, S.
    New search for: Kimoto, T.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

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    Optical-Capacitance-Transient Spectroscopy Study for Deep Levels in 4H-SiC Epilayer Grown by Cold Wall Chemical Vapor Deposition

    New search for: Kato, M.
    New search for: Tanaka, S.
    New search for: Ichimura, M.
    New search for: Arai, E.
    New search for: Nakamura, S.
    New search for: Kimoto, T.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Optical-Capacitance-Transient Spectroscopy Study for Deep Levels in 4H-SiC Epilayer Grown by Cold Wall Chemical Vapor Deposition

    New search for: Kato, M.
    New search for: Tanaka, S.
    New search for: Ichimura, M.
    New search for: Arai, E.
    New search for: Nakamura, S.
    New search for: Kimoto, T.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Optical-Capacitance-Transient Spectroscopy Study for Deep Levels in 4H-SiC Epilayer Grown by Cold Wall Chemical Vapor Deposition

    Contributors:

    Kato, M. (author) / Tanaka, S. (author) / Ichimura, M. (author) / Arai, E. (author) / Nakamura, S. (author) / Kimoto, T. (author) / Nipoti, R. / Poggi, A. / Scorzoni, A.

    Published in:

    Silicon Carbide and Related Materials 2004 ; 381-384

    MATERIALS SCIENCE FORUM ; 483/485

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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