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Infrared Investigation of Implantation Damage in 6H-SiC

Camassel, J. / Wang, H. / Pernot, J. / Godignon, P. / Mestres, N. / Pascual, J.

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Infrared Investigation of Implantation Damage in 6H-SiC

Camassel, J. / Wang, H. / Pernot, J. / Godignon, P. / Mestres, N. / Pascual, J.

Infrared Investigation of Implantation Damage in 6H-SiC

Camassel, J. / Wang, H. / Pernot, J. / Godignon, P. / Mestres, N. / Pascual, J.

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Check availability in my library

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Document information

Title:

Infrared Investigation of Implantation Damage in 6H-SiC

Contributors:

Camassel, J. (author) / Wang, H. (author) / Pernot, J. (author) / Godignon, P. (author) / Mestres, N. (author) / Pascual, J. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 859-862

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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