Effect of Rapid Thermal Annealing Conditions on Parameters of Ni/21R-SiC Contacts: Fid-Bau Portal

Effect of Rapid Thermal Annealing Conditions on Parameters of Ni/21R-SiC Contacts

Litvinov, V. L. / Demakov, K. D. / Agueev, O. A. / Svetlichnyi, A. M. / Konakova, R. V. / Lytvyn, P. M. / Milenin, V. V.

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Effect of Rapid Thermal Annealing Conditions on Parameters of Ni/21R-SiC Contacts

Litvinov, V. L. / Demakov, K. D. / Agueev, O. A. / Svetlichnyi, A. M. / Konakova, R. V. / Lytvyn, P. M. / Milenin, V. V.

Effect of Rapid Thermal Annealing Conditions on Parameters of Ni/21R-SiC Contacts

Litvinov, V. L. / Demakov, K. D. / Agueev, O. A. / Svetlichnyi, A. M. / Konakova, R. V. / Lytvyn, P. M. / Milenin, V. V.

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Document information

Title:

Effect of Rapid Thermal Annealing Conditions on Parameters of Ni/21R-SiC Contacts

Contributors:

Litvinov, V. L. (author) / Demakov, K. D. (author) / Agueev, O. A. (author) / Svetlichnyi, A. M. (author) / Konakova, R. V. (author) / Lytvyn, P. M. (author) / Milenin, V. V. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 905-908

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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