Compatibility of VJFET Technology with MESFET Fabrication and Its Interest for System Integration: Fabrication of 6H and 4H-SiC 110 V Lateral MESFET: Fid-Bau Portal

Compatibility of VJFET Technology with MESFET Fabrication and Its Interest for System Integration: Fabrication of 6H and 4H-SiC 110 V Lateral MESFET

Tournier, D. / Godignon, P. / Montserrat, J. / Planson, D. / Chante, J. P. / Sarrus, F.

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Compatibility of VJFET Technology with MESFET Fabrication and Its Interest for System Integration: Fabrication of 6H and 4H-SiC 110 V Lateral MESFET

Tournier, D. / Godignon, P. / Montserrat, J. / Planson, D. / Chante, J. P. / Sarrus, F.

Compatibility of VJFET Technology with MESFET Fabrication and Its Interest for System Integration: Fabrication of 6H and 4H-SiC 110 V Lateral MESFET

Tournier, D. / Godignon, P. / Montserrat, J. / Planson, D. / Chante, J. P. / Sarrus, F.

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Title:

Compatibility of VJFET Technology with MESFET Fabrication and Its Interest for System Integration: Fabrication of 6H and 4H-SiC 110 V Lateral MESFET

Contributors:

Tournier, D. (author) / Godignon, P. (author) / Montserrat, J. (author) / Planson, D. (author) / Chante, J. P. (author) / Sarrus, F. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 1403-1406

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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