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Simple Method for Mapping Optical Defects in Insulating Silicon Carbide Wafers

Mier, M. / Boeckl, J. / Roth, M. / Balkas, C. / Nelson, M.

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Simple Method for Mapping Optical Defects in Insulating Silicon Carbide Wafers

Mier, M. / Boeckl, J. / Roth, M. / Balkas, C. / Nelson, M.

Simple Method for Mapping Optical Defects in Insulating Silicon Carbide Wafers

Mier, M. / Boeckl, J. / Roth, M. / Balkas, C. / Nelson, M.

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Check availability in my library

Order at Subito €

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Document information

Title:

Simple Method for Mapping Optical Defects in Insulating Silicon Carbide Wafers

Contributors:

Mier, M. (author) / Boeckl, J. (author) / Roth, M. (author) / Balkas, C. (author) / Nelson, M. (author) / Bergman, P. / Janzen, E.

Published in:

Silicon Carbide and Related Materials 2002 ; 357-360

MATERIALS SCIENCE FORUM ; 433/436

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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