Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS: Fid-Bau Portal

Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS

Sartel, C. / Souliere, V. / Dazord, J. / Monteil, Y. / El-Harrouni, I. / Bluet, J. M. / Guillot, G.

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Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS

Sartel, C. / Souliere, V. / Dazord, J. / Monteil, Y. / El-Harrouni, I. / Bluet, J. M. / Guillot, G.

Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS

Sartel, C. / Souliere, V. / Dazord, J. / Monteil, Y. / El-Harrouni, I. / Bluet, J. M. / Guillot, G.

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Title:

Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS

Contributors:

Sartel, C. (author) / Souliere, V. (author) / Dazord, J. (author) / Monteil, Y. (author) / El-Harrouni, I. (author) / Bluet, J. M. (author) / Guillot, G. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 263-266

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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