Heteroepitaxial growth of 3C-SiC using HMDS by atmospheric CVD: Fid-Bau Portal

Heteroepitaxial growth of 3C-SiC using HMDS by atmospheric CVD

Chen, Y. / Matsumoto, K. / Nishio, Y. / Shirafuji, T. / Nishino, S.

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Heteroepitaxial growth of 3C-SiC using HMDS by atmospheric CVD

Chen, Y. / Matsumoto, K. / Nishio, Y. / Shirafuji, T. / Nishino, S.

Heteroepitaxial growth of 3C-SiC using HMDS by atmospheric CVD

Chen, Y. / Matsumoto, K. / Nishio, Y. / Shirafuji, T. / Nishino, S.

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Title:

Heteroepitaxial growth of 3C-SiC using HMDS by atmospheric CVD

Contributors:

Chen, Y. (author) / Matsumoto, K. (author) / Nishio, Y. (author) / Shirafuji, T. (author) / Nishino, S. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 579 - 582

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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