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Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate

Okui, Y. / Jacob, C. / Ohshima, S. / Nishino, S.

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Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate

Okui, Y. / Jacob, C. / Ohshima, S. / Nishino, S.

Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate

Okui, Y. / Jacob, C. / Ohshima, S. / Nishino, S.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate

Contributors:

Okui, Y. (author) / Jacob, C. (author) / Ohshima, S. (author) / Nishino, S. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 331-334

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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