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Nanoscale Electrical Characterization of 3C-SiC Layers by Conductive Atomic Force Microscopy
Nanoscale Electrical Characterization of 3C-SiC Layers by Conductive Atomic Force Microscopy
Nanoscale Electrical Characterization of 3C-SiC Layers by Conductive Atomic Force Microscopy
Yahata, A. (author) / Zhang, L. (author) / Shinohe, T. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 667-670
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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