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Variable Shaped Beam lithography

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Variable Shaped Beam lithography

Access

Access via TIB

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Document information

Similar titles

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Document information

Title:

Variable Shaped Beam lithography

Published in:

MATERIALS TODAY -OXFORD THEN KIDLINGTON- ; 12 ; 40

Publication date:

2009-01-01

Size:

40 pages

ISSN:

1369-7021

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11299

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