X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films: Fid-Bau Portal

X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films

Jiang, L. / Fitzgerald, A. G. / Rose, M. J. / Cheung, R. / Rong, B. / van der Drift, E.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films

Jiang, L. / Fitzgerald, A. G. / Rose, M. J. / Cheung, R. / Rong, B. / van der Drift, E.

X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films

Jiang, L. / Fitzgerald, A. G. / Rose, M. J. / Cheung, R. / Rong, B. / van der Drift, E.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films

Contributors:

Jiang, L. (author) / Fitzgerald, A. G. (author) / Rose, M. J. (author) / Cheung, R. (author) / Rong, B. (author) / van der Drift, E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 193 ; 144-148

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Petrov, P. / Dimitrov, D.B. / Papadimitriou, D. et al. | British Library Online Contents | 1999

X-Ray Photoelectron Spectroscopy Studies on the Bonding Properties of Amorphous Carbon Nitride Films Synthesized by Pulsed Laser Deposition with Different Substrate Temperatures

Rusop, M. / Soga, T. / Jimbo, T. | British Library Online Contents | 2005

Sputtered amorphous carbon nitride films

Kreider, K. G. / Tarlov, M. J. / Gillen, G. J. et al. | British Library Online Contents | 1995

X-ray photoelectron spectroscopy studies of Ag-doped thin amorphous GexSb40-xS60 films

Debnath, R. K. / Fitzgerald, A. G. / Christova, K. | British Library Online Contents | 2002

Photoelectron spectroscopy study of amorphous silicon-carbon alloys deposited by plasma-enhanced chemical vapor deposition

Cicala, G. / Bruno, G. / Capezzuto, P. et al. | British Library Online Contents | 1996