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Study on the photoelectrochemical etching process of semiconducting 6H-SiC wafer

Shin, M. W. / Song, J. G.

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Study on the photoelectrochemical etching process of semiconducting 6H-SiC wafer

Shin, M. W. / Song, J. G.

Study on the photoelectrochemical etching process of semiconducting 6H-SiC wafer

Shin, M. W. / Song, J. G.

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Document information

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Document information

Title:

Study on the photoelectrochemical etching process of semiconducting 6H-SiC wafer

Contributors:

Shin, M. W. (author) / Song, J. G. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 95 ; 191 - 194

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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