Mechanism of Ge2Sb2Te5 chemical mechanical polishing: Fid-Bau Portal

Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

Mechanism of Ge2Sb2Te5 chemical mechanical polishing

Wang, L. / Song, Z. / Zhong, M. / Liu, W. / Yan, W. / Qin, F. / He, A. / Liu, B.

Access

Check availability in my library

Order at Subito €

Page navigation

Document information

Export, share and cite

Mechanism of Ge2Sb2Te5 chemical mechanical polishing

Wang, L. / Song, Z. / Zhong, M. / Liu, W. / Yan, W. / Qin, F. / He, A. / Liu, B.

Mechanism of Ge2Sb2Te5 chemical mechanical polishing

Wang, L. / Song, Z. / Zhong, M. / Liu, W. / Yan, W. / Qin, F. / He, A. / Liu, B.

Access

Check availability in my library

Order at Subito €

Page navigation

Document information

Export, share and cite

Document information

Title:

Mechanism of Ge2Sb2Te5 chemical mechanical polishing

Contributors:

Wang, L. (author) / Song, Z. (author) / Zhong, M. (author) / Liu, W. (author) / Yan, W. (author) / Qin, F. (author) / He, A. (author) / Liu, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 5185-5190

Publication date:

2012-01-01

Size:

6 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

Similar titles

Study on Chemical Mechanical Polishing Mechanism of LiTaO~3 Wafer

Wei, X. / Yuan, H. / Du, H. W. et al. | British Library Online Contents | 2006

Amorphous structure melt-quenched from defective Ge2Sb2Te5

Sun, Z. | British Library Online Contents | 2012

Modeling of Polishing Pad Wear in Chemical Mechanical Polishing

Li, M. / Zhu, Y.W. / Li, J. et al. | British Library Online Contents | 2010

Slurry Design for Chemical Mechanical Polishing

G. Bahar Basim / Brij M. Moudgil | DOAJ | 2014

Free access

Wear phenomena in chemical mechanical polishing

Liang, H. / Kaufman, F. / Sevilla, R. et al. | British Library Online Contents | 1997