Photo-enhanced chemical wet etching of GaN: Fid-Bau Portal

Photo-enhanced chemical wet etching of GaN

Ko, C. H. / Su, Y. K. / Chang, S. J. / Lan, W. H. / Webb, J. / Tu, M. C. / Cherng, Y. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Photo-enhanced chemical wet etching of GaN

Ko, C. H. / Su, Y. K. / Chang, S. J. / Lan, W. H. / Webb, J. / Tu, M. C. / Cherng, Y. T.

Photo-enhanced chemical wet etching of GaN

Ko, C. H. / Su, Y. K. / Chang, S. J. / Lan, W. H. / Webb, J. / Tu, M. C. / Cherng, Y. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Photo-enhanced chemical wet etching of GaN

Contributors:

Ko, C. H. (author) / Su, Y. K. (author) / Chang, S. J. (author) / Lan, W. H. (author) / Webb, J. (author) / Tu, M. C. (author) / Cherng, Y. T. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 96 ; 43-47

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Su, Y. K. / Chang, S. J. / Kuan, T. M. et al. | British Library Online Contents | 2004

Formation of GaN nanostructures with various morphologies by photo-assisted electroless chemical etching

Wang, H. / Zou, C. / Tian, C. et al. | British Library Online Contents | 2010

Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching

Katoh, T. / Yamaguchi, D. / Satoh, Y. et al. | British Library Online Contents | 2002

Si nanofabrication using AFM field enhanced oxidation and anisotropic wet chemical etching

Morimoto, K. / Araki, K. / Yamashita, K. et al. | British Library Online Contents | 1997

Complementary study of defects in GaN by photo-etching and TEM

Weyher, J. L. / Macht, L. / Tichelaar, F. D. et al. | British Library Online Contents | 2002