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    Growth of electromigration-induced hillocks in Al interconnects

    New search for: Nucci, J. A.
    New search for: Straub, A.
    New search for: Bischoff, E.
    New search for: Arzt, E.
    New search for: Volkert, C. A.

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    Growth of electromigration-induced hillocks in Al interconnects

    New search for: Nucci, J. A.
    New search for: Straub, A.
    New search for: Bischoff, E.
    New search for: Arzt, E.
    New search for: Volkert, C. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Growth of electromigration-induced hillocks in Al interconnects

    New search for: Nucci, J. A.
    New search for: Straub, A.
    New search for: Bischoff, E.
    New search for: Arzt, E.
    New search for: Volkert, C. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Growth of electromigration-induced hillocks in Al interconnects

    Contributors:

    Nucci, J. A. (author) / Straub, A. (author) / Bischoff, E. (author) / Arzt, E. (author) / Volkert, C. A. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 17 ; 2727-2735

    Publication date:

    2002-01-01

    Size:

    9 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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