Fabrication of diffractive phase elements for the UV-range by laser ablation patterning of dielectric layers: Fid-Bau Portal

Fabrication of diffractive phase elements for the UV-range by laser ablation patterning of dielectric layers

Ihlemann, J. / Schafer, D.

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Fabrication of diffractive phase elements for the UV-range by laser ablation patterning of dielectric layers

Ihlemann, J. / Schafer, D.

Fabrication of diffractive phase elements for the UV-range by laser ablation patterning of dielectric layers

Ihlemann, J. / Schafer, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of diffractive phase elements for the UV-range by laser ablation patterning of dielectric layers

Contributors:

Ihlemann, J. (author) / Schafer, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 197-198 ; 856-861

Publication date:

2002-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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