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    Effects of molybdenum, silver dopants and a titanium substrate layer on copper film metallization

    New search for: Ko, Y. K.
    New search for: Jang, J. H.
    New search for: Lee, S.
    New search for: Yang, H. J.
    New search for: Lee, W. H.
    New search for: Reucroft, P. J.
    New search for: Lee, J. G.

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    Effects of molybdenum, silver dopants and a titanium substrate layer on copper film metallization

    New search for: Ko, Y. K.
    New search for: Jang, J. H.
    New search for: Lee, S.
    New search for: Yang, H. J.
    New search for: Lee, W. H.
    New search for: Reucroft, P. J.
    New search for: Lee, J. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of molybdenum, silver dopants and a titanium substrate layer on copper film metallization

    New search for: Ko, Y. K.
    New search for: Jang, J. H.
    New search for: Lee, S.
    New search for: Yang, H. J.
    New search for: Lee, W. H.
    New search for: Reucroft, P. J.
    New search for: Lee, J. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Effects of molybdenum, silver dopants and a titanium substrate layer on copper film metallization

    Contributors:

    Ko, Y. K. (author) / Jang, J. H. (author) / Lee, S. (author) / Yang, H. J. (author) / Lee, W. H. (author) / Reucroft, P. J. (author) / Lee, J. G. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 38 ; 217-222

    Publication date:

    2003-01-01

    Size:

    6 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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