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Surface roughening effect in sub-keV SIMS depth profiling

Liu, R. / Ng, C. M. / Wee, A. T.

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Surface roughening effect in sub-keV SIMS depth profiling

Liu, R. / Ng, C. M. / Wee, A. T.

Surface roughening effect in sub-keV SIMS depth profiling

Liu, R. / Ng, C. M. / Wee, A. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Surface roughening effect in sub-keV SIMS depth profiling

Contributors:

Liu, R. (author) / Ng, C. M. (author) / Wee, A. T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 256-259

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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