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SIMS analysis of insulating multilayer including silicon nitride

Ueki, Y. / Kawashima, T. / Ishiwata, O.

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SIMS analysis of insulating multilayer including silicon nitride

Ueki, Y. / Kawashima, T. / Ishiwata, O.

SIMS analysis of insulating multilayer including silicon nitride

Ueki, Y. / Kawashima, T. / Ishiwata, O.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

SIMS analysis of insulating multilayer including silicon nitride

Contributors:

Ueki, Y. (author) / Kawashima, T. (author) / Ishiwata, O. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 453-456

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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